Fanuc alarm: 4067 - LASER CABINET OH
Internal cabinet temperature too high
None currently
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Internal cabinet temperature too high
None currently
A discharge tube does not work.
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Abnormal operation of the shutter
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Failure in RF power supply
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Failure in A/D converter 2
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Failure in A/D converter 1
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Excessive error in the gap control axis
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In the G26 command, command value is out of range.
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In the G25 command, command value is out of range.
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The optical path cannot be compensated. Please return the reference point.
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